Abstract:Miniaturized capacitive microphones often show sensitivity degradation in the low-frequency region due to electrical and acoustical time constants. For low-frequency sound detection, conventional systems use a microphone with a large diaphragm and a large back chamber to increase the time constant. In order to overcome this limitation, an electret gate on a field-effect transistor (ElGoFET) structure was proposed, which is the field-effect transistor (FET) mounted diaphragm faced on electret. The use of the sensing mechanism consisting of the integrated FET and electret enables the direct detection of diaphragm displacement, which leads its acoustic senor application (ElGoFET microphone) and has a strong ability to detect low-frequency sound. We studied a theoretical model and design for low-frequency operation of the ElGoFET microphone prototype. Experimental investigations pertaining to the design, fabrication, and acoustic measurement of the microphone were performed and the results were compared to our analytical predictions. The feasibility of the microphone as a low-frequency micro-electromechanical system (MEMS) microphone, without the need for a direct current bias voltage (which is of particular interest for applications requiring miniaturized components), was demonstrated by the flat-band frequency response in the low-frequency region.

Single-chip Condenser Miniature Microphone with a High Sensitive Circular Corrugated Diaphragm

On the Single-Chip Condenser Miniature Microphone Using DRIE and Backside Etching Techniques

Theoretical and Experimental Studies of Single-Chip-Processed Miniature Silicon Condenser Microphone with Corrugated Diaphragm

Study of a highly sensitive miniature condenser microphone based on MEMS technology

Fabrication of a novel structural miniature silicon condenser microphone

Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm

Design And Fabrication of Condenser Microphone Using Wafer Transfer And Micro-electroplating Technique

Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

Study of corrugated diaphragms used in silicon condenser microphones

DESIGN AND IMPLEMENTATION OF A CMOS-MEMS MICROPHONE WITHOUT THE BACK-PLATE

Development Of A Cmos Compatible Process For Silicon Miniature Microphone With A High Sensitivity

Development Of A No-Back-Plate Soi Mems Condenser Microphone

SENSITIVITY IMPROVEMENT OF NO-BACK-PLATE MEMS MICROPHONE USING POLYSILICON TRENCH-REFILLED PROCESS

Dynamic Characteristics of Novel Single-Chip Fabricated Corrugated Diaphragms for Micro-Acoustic Devices

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms

Design and Implementation of A Capacitive-Type Microphone with Rigid Diaphragm and Flexible Spring Using the Two Poly Silicon Micromachining Processes

Design and implementation of a novel double-poly microphone with rigid acoustic receiver, flexible spring supporter, and harm backplate

Dynamic Behaviour of Miniature Microphone with Corrugated Membrane:Top-down Design with EDA/CAD

Novel in-plane gap closing CMOS-MEMS microphone with no back-plate

A Modeling and Feasibility Study of a Micro-Machined Microphone Based on a Field-Effect Transistor and an Electret for a Low-Frequency Microphone