Microstructure, Mechanical And Magnetic Properties Of Fetin Thin Films By Ibad

Ji Zhang,Xinchun Lu,Guoshun Pan,Wenzhi Li,Jianbin Luo
DOI: https://doi.org/10.1515/ijnsns.2002.3.3-4.643
2002-01-01
International Journal of Nonlinear Sciences and Numerical Simulation
Abstract:FeTiN thin films with different percentage of Fe,Ti,N deposited by Ion Beam Assisted Deposition technique were studied. The structure and composition of the films were characterized with X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The hardness and reduced elastic modulus of these films were studied using a nano-hardness tester (NHT). The magnetization of the films were measured using a vibration sample magnetometer (VSM). The percentage of Fe,Ti,N had significant effect on the structure, hardness, reduced elastic modulus and magnetization of the FeTiN films. when the percentage of N content was about 8.7%,The mechanical and magnetic properties were excellent relatively.
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