Microstructural Study on Multilayer [fetan/tan]5 Films

Q Zhan,R Yu,Ll He,Dx Li,Hb Nie,C Ong
DOI: https://doi.org/10.1016/s0167-577x(03)00238-6
IF: 3
2003-01-01
Materials Letters
Abstract:The microstructure of [FeTaN/TaN]5 multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A 〈110〉 texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers.
What problem does this paper attempt to address?