Microstructure and Mechanical Properties of Fe-N/TiN Multilayers

许光跃,路新春,常香荣,赵春生
DOI: https://doi.org/10.3321/j.issn:1000-0054.2002.11.010
2002-01-01
Abstract:FeN/TiN multilayers were produced with different thicknesses of the TiN layers and 20 nm thick FeN layers. The multilayers were deposited using DC magnetron sputtering. The structure and composition of the multilayers were characterized with lowangle Xray diffraction, Auger depth profiling and Xray diffraction. The hardness and reduced elastic modulus of the multilayers were studied using a nanohardness tester. The bonding strength between the multilayers and the substrate was measured using a nanoscratch tester. The tests evaluated the effect of the TiN layer thickness on the critical load, the hardness and the reduced elastic modulus. The results show that a TiN layer thickness of 2 nm has the best mechanical properties.
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