Ti/TiN multilayer coatings: deposition technique, characterization and mechanical properties

A. Dück,N. Gamer,W. Gesatzke,M. Griepentrog,W. Österle,M. Sahre,I. Urban
DOI: https://doi.org/10.1016/s0257-8972(01)01171-9
IF: 4.865
2001-07-01
Surface and Coatings Technology
Abstract:Ti/TiN multilayer coatings with multilayer periods in the range 5–50 nm and a final thickness of 2 μm were deposited on steel substrates by cyclic modulation of nitrogen gas flow into the chamber of a PVD sputtering device. Coating characterization was performed by cross-sectional transmission electron microscopy, glancing-angle X-ray diffraction and instrumental indentation testing. Individual α-titanium and titanium nitride layers were always observed, although for the finer microstructures, the TiN layers were thicker than the Ti layers by a factor three. The plastic hardness of the films increased steadily with decreasing layer spacing, following a Hall–Petch relationship. Finally, a hardness value of 42 GPa was reached, which is similar to that of a thick TiN monolayer, prepared under the same coating conditions.
physics, applied,materials science, coatings & films
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