High Moment Soft Magnetic FeTiN Thin Films for Recording Head Materials

HY Wang,YJ He,ZW Ma,EY Jiang,HS Huang,WH Mao
DOI: https://doi.org/10.1063/1.369742
IF: 2.877
1999-01-01
Journal of Applied Physics
Abstract:Soft magnetic properties and thermal stability of Fe–Ti–N alloys films have been investigated. Thin films with composition in the range of 8–10 at. % Ti, 10.5–14 at. % N, and balance Fe were prepared by reactive sputtering method. The films exhibit good soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., low coercivity Hc∼1.5 Oe, high permeability μ∼3200 at 1 MHz and very high saturation magnetization 4πMs∼24 kG. The thermal stability of these films was also found to be good, e.g., Hc was less than 2 Oe, and 4πMs was higher than 23 kG for the films annealed up to 500 °C. The high electrical resistivity ρ∼100 μ Ω cm of the films can minimize the eddy current loss in the high frequency applications. The combination of high 4πMs and relatively high anisotropy field Ha∼10 Oe in the film is conductive to the suppression of the undesirable ferromagnetic resonance interfere up to the GHz frequency range.
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