MAGNETITE AND MAGHEMITE THIN FILMS FOR MAGNETIC RECORDING

T.S. Chin,Wei-Der Chang
1995-01-01
Journal of the Korean Magnetics Society
Abstract:High coercivity thin Fe₃O₄ and γ-Fe₂O₃ films were deposited on Si substrate under well controlled O₂ partial pressure by dc-reactive magnetron sputtering. The coercivity of as-deposited magnetite films is below 640 Oe. After oxidizing at 360℃ for 10 minutes, the films transform to maghemite γ-Fe₂O₃ completely, and the coercivity increases greatly to 2100 ~ 4120 Oe, depending on modification or not with minor addition of Co or/and Mn. The origin of coercivity enhancement is attributed mainly to magnetic anisotropy arisen from interfacial stress. The addition of 5 at% Co and 5 at% Mn greatly enhances coercivity and squareness ratio. These films are potential for ultra-high density recording applications.
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