Undoped maghemite thin films with coercivity up to 2100 Oe for magnetic recording

W. D. Chang,T. S. Chin
DOI: https://doi.org/10.1109/20.538709
IF: 1.848
1996-01-01
IEEE Transactions on Magnetics
Abstract:Undoped thin /spl gamma/-Fe/sub 2/O/sub 3/ films were deposited in-situ on Si substrate under well controlled O/sub 2/ partial pressure by dc-reactive magnetron sputtering Fe/sub 3/O/sub 4/ phase then controlled oxidation to become the maghemite phase at 360/spl deg/C for 10 min. The coercivity of as-deposited magnetite films is around 400/spl sim/640 Oe. After oxidation at 320-360/spl deg/C for 1...
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