A Novel Barrier to Copper Metallization by Implanting Nitrogen into SiO2

Guo-hai ZHANG,Yang XIA,He QIAN,Wen-fang GAO,Guang-hua YU,Shi-bing LONG
DOI: https://doi.org/10.3321/j.issn:0253-4177.2001.03.005
2001-01-01
Abstract:The barrier to the copper diffusion is one of the key technologies in copper metallization. A novel barrier has been presented, which is a thin film of silicon oxynitride formed by implanting nitrogen into PECVD silicon dioxide. The method proved highly effective to block the copper diffusion after high frequency C-V measurements at different BTS (Bias Thermal Stress) conditions and the XPS (X-ray Photoelectron Spectroscopy) analysis. Furthermore, this method has the advantage of simplifying the damascene process of copper metallization, which has also been analyzed and discussed in detail.
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