Study on interfacial SiO2 layer of silicon direct bonding

Jin He,Xin Wang,Xingbi Chen
1999-01-01
Abstract:The interfacial SiO2 layer of silicon direct bonding has been studied. by means of AES (Auger Electron Spectrum) and SEM (Scanning Electron Microscope). It is found experimentally that interfacial SiO2 disintegrates into sphere-shaped-like islands with average radius much larger than L, the thickness of the native oxide layer, and is of amorphous material, SiO1.5. The theoretical analysis shows that SiO2 spontaneously disintegrates into islands because the interface free energy will decrease as much as possible.
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