Study on the Interfacial SiO/sub 2/ Layer of Silicon Wafer Direct Bonding

H Jin,W Xin,BC Xing
DOI: https://doi.org/10.1109/icsict.1998.786124
1998-01-01
Abstract:The interfacial SiO2 Layer of silicon wafer direct bonding has been studied in this paper. By means of AES and SEM, it ha been found that interfacial SiO2 disintegrates into sphere-shaped-like islands with average radius much larger than the thickness of the native oxide layer, and is of amorphous material, SiO1.5 experimentally. The theoretical analysis shows that SiO2 spontaneously disintegrates into islands because of to decrease the inter-face free energy as muck as possible.
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