Annealing effect of Si/Si1-x/Gex/Si single quantum wells studied by admittance spectroscopy

Lian Ke,Feng Lin,Shengkun Zhang,Dayu Chen,Fang Lu,Xun Wang
1998-01-01
Abstract:The structural thermal stability of Si/Si1-xGex/Si single quantum wells has been investigated by admittance spectroscopy. The thermal emitting model curve of admittance spectroscopy and the experimental results of deep-level transient spectroscopy suggest that the strain relaxation is not obvious under the condition of 900°C 10 minutes thermal annealing. However, the subband sharply decreases due to the atom interdiffusion. The experimental results also show that the activation energy is 1.08eV, which associates with interdiffusion in Si/Si0.75Ge0.25/Si quantum well.
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