Abstract:Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, $$ (0001) - [10\bar{1}0]{\text{ZnO}} $$ or $$ (11\bar{2}0) - [0001]{\text{ZnO}} $$ directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the $$ (11\bar{2}0) - [0001] $$ structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

Pulsed Laser Deposition and Acoustic Property of Piezoelectric / Nonpiezoelectric Multilayer Films

Preparation of Piezoelectric-Coefficient Modulated Multilayer Film ZnO/Al2O3 and Its Ultrahigh Frequency Resonance

Pulsed-laser deposition of piezoelectric-coefficient modulated multilayered films ZnO/Al2O3 on silicon and their enhanced acoustic resonance

Influence of a Piezoelectric ZnO Intermediate Layer on Rayleigh Waves Propagating in Sc 43% AlN 57% /zno/diamond Hetero-Structures Subjected to Uniaxial Stress

Pulsed Laser Reactive Ablation of (0001)-Textured ZnO Optical Waveguiding Films on Α-Sio2

Growth and Characterization of LiNbO3 Piezoelectric Films by Pulsed Laser Ablation

Properties of multi-layered PZT films

High Resistive Zno/Diamond/Si Films Grown Via Metal-Organic Chemical Vapour Deposition

Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors

Microstructure and Properties of Cu-Doped Zno Films Prepared by Dc Reactive Magnetron Sputtering

Thickness-Dependent Monoclinic Phases and Piezoelectric Properties Observed in Polycrystalline (pb0.94la0.04)(zr0.60ti0.40)o3 Thin Films

Structural and Electrical Properties of 0.1biybo3–0.9pbtio3 Piezoelectric Thin Films Grown by Pulsed Laser Deposition

Thickness-Dependent Phase Transition and Piezoelectric Response in Textured Nb-Doped Pb(Zr0.52Ti0.48)O3 Thin Films

Solidly Mounted Resonators Fabricated for GHz Frequency Applications Based on MgxZn1-xO Piezoelectric Film

V-Doped Zno Thin Films Prepared by Rf Magnetron Sputtering

Effect of the orientation polarization and texturing on nano-mechanical and piezoelectric properties of PZT (52/48) films

Structural, optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD)

Deposition of ZnO Films with C-Axes Lying in R-sapphire Substrate Planes

Crystalline Structure Effect on the Performance of Flexible ZnO/polyimide Surface Acoustic Wave Devices

Microstructure-related Piezoelectric Properties of a ZnO Film Grown on a Si Substrate

On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition