Abstract:Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, $$ (0001) - [10\bar{1}0]{\text{ZnO}} $$ or $$ (11\bar{2}0) - [0001]{\text{ZnO}} $$ directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the $$ (11\bar{2}0) - [0001] $$ structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

Propagation of leaky surface acoustic waves in a layered piezoelectric semiconductor structure

Influence of a Piezoelectric ZnO Intermediate Layer on Rayleigh Waves Propagating in Sc 43% AlN 57% /zno/diamond Hetero-Structures Subjected to Uniaxial Stress

Wave Propagation Through an Inhomogeneous Slab Sandwiched by the Piezoelectric and the Piezomagnetic Half Spaces

Love Waves in a Piezoelectric Semiconductor Thin Film on an Elastic Dielectric Half-Space

Rayleigh wave in layered piezoelectric semiconductor with consideration of PN junction effects

Shear Horizontal Surface Waves in a Layered Piezoelectric Nanostructure with Surface Effects

Propagation of Rayleigh-type surface waves in a layered piezoelectric nanostructure with surface effects

Propagation of Bleustein-Gulyaev waves in a prestressed layered piezoelectric structure.

A Unified Model for Investigating the Propagation of SH Surface Waves in a Piezoelectric Layered Medium

Calculation of surface acoustic waves in a multilayered piezoelectric structure

Wavenumber Domain Analysis of Surface Acoustic Wave Scattering from Localized Gratings on Layered Piezoelectric Substrate

Propagation of Surface Acoustic Waves in Prestressed Anisotropic Layered Piezoelectric Structures

SH surface waves in piezoelectric semiconductors loaded with a finite viscous liquid layer

The Study Of P-Sv Wave Propagation In The Periodic Piezoelectric Layered Material

Theoretical Investigation of Surface Acoustic Wave Propagation Characteristics in Periodic (aln/zno)(n)/diamond Multilayer Structures

SURFACE WAVES IN A PIEZOELECTRIC HALF-SPACE WITH SURFACE EFFECT

Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates

The Analytical Solution and Numerical Simulation of the P-SV Wave Propagation in the Piezoelectric Laminate

3-D FEM simulation of piezoelectric boundary acoustic wave resonator

Investigation of surface acoustic waves propagating in ZnO-SiO2-Si multilayer structure.

Transverse Surface Waves in a Layered Structure with a Functionally Graded Piezoelectric Substrate and a Hard Dielectric Layer.