EFFECT OF INITIAL STRESS ON THE PROPAGATION BEHAVIOR OF GENERALIZED RAYLEIGH WAVES IN LAYERED PIEZOELECTRIC STRUCTURES
Hua Liu,Tiejun WANG,Zikun Wang
DOI: https://doi.org/10.3321/j.issn:0459-1879.2000.04.014
IF: 3.5
2000-01-01
Acta Mechanica Sinica
Abstract:Surface acoustic wave devices are applied extensively to many technicalfields. Such as television, telecommunication, nondestructiveevaluation, radar and health monitoring systems. Rayleigh waves are themost commonly used wave modes in surface acoustic wave devices, which isrelated to the concentration of the energy at the sensitive surface. Thebasic structure supporting the propagation of Rayleigh waves is apiezoelectric substrate or a layered piezoelectric structure with apiezoelectric thin film deposited on a nonpiezoelectric substrate.Great efforts have been devoted by many researchers to study thepropagation behavior of Rayleigh waves on the basic structures. For thelayered piezoelectric structures, it is well known that due to themismatch of the material properties of the layer and the substrate,there exists residual stress during the manufacture process ofpiezoelectric surface acoustic wave devices. On the other hand, toprevent the piezoelectric material from brittle fracture, the layeredpiezoelectric structure is usually pre-stressed during the manufactureprocess, where the initial stress is negative with the magnitude of100 MPa. To the author's knowledge, no work has been carried out so farto discuss the effect of initial stress on the propagation behavior ofgeneralized Rayleigh waves in layered piezoelectric structures. In thispaper we are concerned with the propagation behavior of generalizedRayleigh wave in pre-stressed layered piezoelectric half-space, where athin piezoelectric layer is perfectly bonded to a non-piezoelectricelastic half-space substrate. Solutions of the mechanical displacementand electrical potential function are obtained for the piezoelectriclayer and elastic substrate, respectively, by solving theelectromechanically coupled field equations. The phase velocityequations of generalized Rayleigh wave propagation are obtained forelectrically open and shorted cases on the free surface, respectively.Effect of the initial stress on the phase velocity of generalizedRayleigh wave propagation and the electromechanical coupling factor ofthe layered piezoelectric structure are respectively discussed, whereone set of the piezoelectric layer on elastic substrate system, i.e.,PZT-5H ceramic layer2 glass substrate is considered. It isseen that the phase velocity of generalized Rayleigh wave propagationdecreases and the electromechanical coupling factor increases remarkablyas the absolute value of initial stress is greater than 100 MPa. Theseresults are very useful for the design of surface acoustic wave devices.