Abstract:Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, $$ (0001) - [10\bar{1}0]{\text{ZnO}} $$ or $$ (11\bar{2}0) - [0001]{\text{ZnO}} $$ directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the $$ (11\bar{2}0) - [0001] $$ structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

Calculation of surface acoustic waves in a multilayered piezoelectric structure

Influence of a Piezoelectric ZnO Intermediate Layer on Rayleigh Waves Propagating in Sc 43% AlN 57% /zno/diamond Hetero-Structures Subjected to Uniaxial Stress

Propagation of leaky surface acoustic waves in a layered piezoelectric semiconductor structure

Propagations of Rayleigh and Love Waves in ZnO Films/glass Substrates Analyzed by Three-Dimensional Finite Element Method

Design Study on SAW Devices Based on ZnO/Si Structure

Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates

Enhanced Coupling Coefficient in Dual-Mode ZnO/SiC Surface Acoustic Wave Devices with Partially Etched Piezoelectric Layer

Characteristics of one-port surface acoustic wave resonator fabricated on ZnO/6H-SiC layered structure

Bulk wave propagation in layered piezomagnetic/piezoelectric plates with initial stresses or interface imperfections

Study on the Attributes of Transverse Surface Waves in a Layered Piezoelectric Semi-Space with Surface Elasticity Theory and Extended Stroh Formalism

Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

Piezoacoustic wave spectra using improved surface impedance matrix: Application to high impedance-contrast layered plates

SURFACE WAVES IN A PIEZOELECTRIC HALF-SPACE WITH SURFACE EFFECT

Theoretical Analysis of Surface Waves in Piezoelectric Medium with Periodic Shunting Circuits

High-Frequency Surface Acoustic Wave Devices Based on ZnO/SiC Layered Structure

A Unified Model for Investigating the Propagation of SH Surface Waves in a Piezoelectric Layered Medium

Love wave propagation on nano-sized layered piezoelectric plate clamped on micropolar substrate

Wave Propagation In A Piezoelectric Plate With Surface Effect

Characteristics of surface acoustic waves in (11 2̅ 0)ZnO film/ R -sapphire substrate structures

Propagation of Love Waves with Surface Effects in an Electrically-Shorted Piezoelectric Nanofilm on a Half-Space Elastic Substrate.

Theoretical investigation of surface acoustic wave in the new, three-layered structure: ZnO/AlN/diamond