Collector compensative ion-implantation technology for polysilicon emitter transistors

Meihua He,Lichun Zhang,Yangyuan Wang
1997-01-01
Abstract:A new method to improve the speed of polysilicon emitter transistors and circuits has been proposed. By compensative ion-implantation in the epitaxial area under extrinsic base, the net doping concentration of this epitaxial area was decreased, thus reduced the B-C junction capacitance and collector R-C charge and discharge time. The epitaxy doping concentration under intrinsic base is unchanged, so the DC characteristics of polysilicon emitter transistors is unaffected. The investigation results of compensative ion implantation and device characteristics have also been presented.
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