Raman scattering spectra of GaN grown by MOCVD

YuZhen Tong,Guoyi Zhang,ZiLiang Xu,XiaoZhong Dang,Jingjing Wang,Sixuan Jing,Shumin Wang,Hongdu Liu
1996-01-01
Abstract:The Raman spectra in the backscattering geometry configurations of GaN grown by MOCVD with phenylhydrazine as nitrogen source on the substrate of GaAs (001), Al2O3(0001) and Si(111) were measured and compared. The Al(LO), Al(TO), EL(LO), EL(TO) and E2 modes of ��-GaN were observed. In combination with the X-ray diffraction spectra, the difference in Raman scattering spectra of GaN/GaAs sample with different structure phases caused by different growth process was analyzed, and it was found that the Raman spectra of GaN depend on the structure phase of its epitaxial layer, its completeness and technological processing, which can then be used as an useful measure to detect the structural characteristics of GaN epitaxial layer. Besides, the phonon mode of 741cm-1, which may come from ��-GaN, was also observed on the GaN sample with small amount of ��-GaN.
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