Effect of stress state in different TiN-films on their tribological performances

Daming Zhuang,Jiajun Liu,Baoliang Zhu
1996-01-01
Abstract:The X-ray diffractometer was used to measure the stress states of TiN-films on the 52100-steel substrate prepared by IBED, PCVD, and IP respectively. Analyses were carried out on the causes of stress formation in the TiN-films under different deposition process. Their tribological performances were compared under the same wear condition with load and velocity varied, and the influence of the stress-state, at both sides adjacent to the interface between TiN film and 52100-steel substrate, on the adhesion strength, wear resistance, and wear mechanism of the film was studied. The results show that the IBED film has the highest film-substrate adhesion and optimum tribological performances.
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