Surface Energies And Morphologies Of Chemical-Vapor-Deposited Diamond Films

Yf Zhang,Fq Zhang,Gh Chen
DOI: https://doi.org/10.1063/1.357912
IF: 2.877
1994-01-01
Journal of Applied Physics
Abstract:Using a model where a fraction of carbon dangling bonds on the growth surface are saturated by hydrogen, the surface energies of chemical-vapor-deposited diamond crystals during the preparation process have been calculated. The results show that the surface energies increase with the increasing substrate temperature, and the surface energy-temperature curves of the three most energetically favored crystal planes, (100), (110), and (111), intersect at a critical substrate temperature. Then, the changes of predominant facets in the surface morphology from {100} to {111} with the increasing substrate temperature can be interpreted. Furthermore, it is found that the surface energies of diamond are lower than that of graphite in the chemical-vapor-deposition process of diamond.
What problem does this paper attempt to address?