An Effective Capacitance Model for 28-Nm and Beyond Copper Interconnect

Yajun Xu,Fanfei Bai,Wuping Liu,Chaoying Xie
DOI: https://doi.org/10.1109/ted.2013.2259237
IF: 3.1
2013-01-01
IEEE Transactions on Electron Devices
Abstract:In 28-nm CMOS technology, copper interconnect becomes complicated as the dielectric copper diffusion barrier and low-kappa damage compromise capacitance gain from low-kappa implementation. As a consequence, accurate and effective estimation of the interconnect capacitance is a very challenging task during integration and unit process development. This paper attempts to integrate the impacts of the technological innovations and presents a new compact capacitance model by modifying one of the existing empirical models. The new model demonstrates good agreement with Raphael simulation and less than 2% delta to the real Si data at 28-nm node. Effects of the transition layer and the low-kappa damage layer on capacitance and the impact of terminal capacitance on the coupling capacitance are discussed in detail.
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