Design of on-chip temperature-controlling system for MEMS vibratory gyroscope

Huiliang Cao,Bo Yang,Lu Xu,Hongsheng Li,Shourong Wang

DOI: https://doi.org/10.3969/j.issn.1001-0505.2013.01.011

2013-01-01

Abstract:To improve the temperature characteristic of a micro electro mechanical system (MEMS) gyroscope, an on-chip temperature-controlling system is designed based on the gyroscope structure chip TC10 designed by Southeast University. First, the material and structure of a micro heater and a micro thermal resistance are discussed and the working principle of the temperature-controlling system is analyzed. Then, the temperature model of the gyroscope chip is established. The proportion integration differentiation (PID) parameters are determined by using the Ziegler-Nichols method. The system model is simulated, and the rapidity and stability of the system is proved. Finally, the controlling circuit is designed through combining the model and the PID parameters. The temperature curve of the micro thermal resistance is drawn through the temperature experiments. The results show that the temperature in gyroscope chip can be controlled near the controlling point in thermal experiments. With the temperature controlling, when the ambient temperature ranges from -20 to 60°C, the temperature variation in gyroscope chip decreases from 78.453 to 4.949°C, and the variation of drive mode resonance frequency changes from 3.76 to 0.48 Hz, which proves the feasibility of the on-chip temperature-controlling technology.