Research on Thermal Characteristic and Compensation Algorithm for MEMS-gyroscope

陈怀,张嵘,周斌,陈志勇
DOI: https://doi.org/10.3969/j.issn.1000-9787.2004.10.009
2004-01-01
Abstract:MEMS-gyroscope is a kind of angular-rate-sensor developed in recent years, which has smaller size,lighter weight and lower cost than traditional rate-sensor. But temperature changing largely influences the performance of MEMS-gyroscope.The influence by temperature changing is analyzed.Relation among zero-rate-output,phase of drive-axis and temperature is derived.Therefore,a novel compensation algorithm without temperature-sensor is presented.The thermal bias drift of the gyroscope compensated by temperature-experiment is reduced to 5% of the value before compensation.The results show a new method to improve the performance of MEMS-gyroscope.
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