Infrared Ellipsometry and Near-Infrared-to-vacuum-ultraviolet Ellipsometry Study of Free-Charge Carrier Properties in In-polar P-Type InN

Schöche Stefan,Hofmann Tino,Sedrine Nebiha Ben,Linköping University,Wang Xinqiang,Yoshikawa Akihiko,Schubert Mathias
DOI: https://doi.org/10.1557/opl.2012.86
2012-01-01
MRS Proceedings
Abstract:We apply infrared spectroscopic ellipsometry (IRSE) in combination with near-infrared to vacuum-ultraviolet ellipsometry to study the concentration and mobility of holes in a set of Mg-doped In-polar InN samples of different Mg-concentrations. P-type behavior is found in the IRSE spectra for Mg-concentrations between 1×1018 cm−3 and 3×1019 cm−3. The free-charge carrier parameters are determined using a parameterized model that accounts for phonon-plasmon coupling. From the NIR-VUV data information about layer thicknesses, surface roughness, and structural InN layer properties are extracted and related to the IRSE results.
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