Infrared ellipsometry and near-infrared-to-vacuum-ultraviolet ellipsometry study of free-charge carrier properties in In-polar p-type InN

Stefan Schöche,Tino Hofmann,Nebiha Ben Sedrine,Vanya Darakchieva,Xinqiang Wang,Akihiko Yoshikawa,Mathias Schubert
DOI: https://doi.org/10.1557/opl.2012.86
2011-01-01
Abstract:We apply infrared spectroscopic ellipsometry (IRSE) in combination with near-infrared to vacuum-ultraviolet ellipsometry to study the concentration and mobility of holes in a set of Mg-doped In-polar InN samples of different Mg-concentrations. P-type behavior is found in the IRSE spectra for Mg-concentrations between 1×10 18 cm −3 and 3×10 19 cm −3 . The free-charge carrier parameters are determined using a parameterized model that accounts for phonon-plasmon coupling. From the NIR-VUV data information about layer thicknesses, surface roughness, and structural InN layer properties are extracted and related to the IRSE results.
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