GIAXD and XPS Characterization of Sp3c Doped SiC Superhard Nanocomposite Film

Jian Yi,Xiaodong He,Yue Sun,Zhipeng Xe,Weijiang Xue,Fenyan Cao
DOI: https://doi.org/10.4028/www.scientific.net/kem.512-515.971
2012-01-01
Key Engineering Materials
Abstract:The sp3C doped SiC superhard nanocomposite films had been deposited on stainless steel (SS) substrates at different temperature by electron beam-physical vapor deposition (EB-PVD). The sp3C doped SiC film was studied by grazing incidence X-ray asymmetry diffraction (GIAXD), and X-ray photoelectron spectroscopy (XPS). The results of GIAXD showed that the sp3 doped SiC nanocomposite films were not perfect crystalline, which was composed with fine SiC nanocrystals, and a second phase very similar with diamond like carbon (DLC). XPS analysis showed that the excess C existing in films and turned from diamond into DLC from the surface to inner of film.
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