Study on Characterization of Micro Heater Used for Micro PCR Chip

Wang Junqiang,Wu Cinan,Zhang Pu,Guo Cangran,Liu Zewen
DOI: https://doi.org/10.3969/j.issn.1003-353x.2012.06.007
2012-01-01
Abstract:A micro heater used for micro polymerase chain reaction(PCR) chip was designed and fabricated.The thermal experiments were performed with the obtained micro heater according to the PCR cycling temperature requirement.The micro heater was fabricated on silicon substrate using micro-electro-mechanical systems(MEMS) compatible sputtering technology.The micro heater structural material is Pt.The experiments on heating the chip to the temperature in different PCR stages,saying,the denaturation,annealing and extending were conducted by means of applying different control voltage.The experimental results show that the temperature of ramping rate is 0.68 ℃/s and 1.23 ℃/s correspondingly under the control voltages 25 V and 32 V.Its cooling rate both are 1 ℃/s in atmosphere environment.The average power dissipation of each reaction chamber is 50 mW and the maximum power dissipation is 80 mW in one PCR cycle.For a PCR chip with size of 10 mm×10 mm,the total maximum power is 0.96 W.The first thermal PCR cycle is 220 s,and in the following cycles the time needed is only 175 s.
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