A Novel Single-Fet Cell And Array Architecture For Ferroelectric Nonvolatile Memories

Wq Zhang,Tl Ren,Cx Li,Lt Liu,J Zhu,Zj Li
DOI: https://doi.org/10.1080/713718316
2002-01-01
Integrated Ferroelectrics
Abstract:A novel Metal-Ferroelectric-Semiconductor FET (MFSFET) device with special doped source/drain is proposed. The special shaped drain and source regions will form a JFET (Junction FET) deep in the bulk. Write disturbance can be avoided in an array of such cells.
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