Design and experimental research on vacuum packaging of MEMS gyroscope based on braze welding

ZHAO Xiao-hui,ZHOU Bin,CHEN Zhi-yong,ZHANG Rong
DOI: https://doi.org/10.3969/j.issn.1000-9787.2012.10.015
2012-01-01
Abstract:Vacuum package is an effective method to reduce the vibration damping,and improve the quality factor,and to improve the performance of silicon MEMS linear vibratory gyroscopes.A design proposal of vacuum packaging of gyroscopes based on braze welding is introduced.The proposal is executed without using any getter,so the controllable vacuum degree can be realized.Theoretical calculation shows that,this packaging can maintain vacuum degree below 1Pa.The test on vacuum packaged gyroscope shows that the Q factor of gyroscope's driving mode is 1700,which meets the design goals of 1500.After test for 186d,the gyro's Q factor remains unchanged,which verifies the reliability of this vacuum packaging scheme.
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