The di-vacancy in particle-irradiated, strain-relaxed SiGe

H av Skardi,A Bro Hansen,A Mesli,A Nylandsted Larsen
DOI: https://doi.org/10.1016/S0168-583X(01)00893-X
2002-01-01
Abstract:The di-vacancy is known to introduce three energy levels in the energy-band gap of Si. Using deep level transient spectroscopy (DLTS) on particle-irradiated p+n and n+p diodes, we have followed these levels in epitaxially grown, strain-relaxed Si1−xGex as a function of x for 0⩽x⩽0.5. Both the single- and double-acceptor levels located in the upper half of the band gap in Si move gradually deeper into the gap with increasing x. While the double-acceptor level remains in the upper half of the band gap of the alloys, the single-acceptor level crosses the mid-gap for x≈0.25. The donor level becomes gradually more shallow, but remains pinned to the conduction band. The anneal temperature of the di-vacancy is found to be independent of composition in the investigated composition range.
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