Structural characteristics and the control of crystallographic orientation of CeO2 thin films prepared by laser ablation

Mei-Ya Li,Zhong-Lie Wang,Shou-Shan Fan,Qing-Tai Zhao,Guang-Cheng Xiong
DOI: https://doi.org/10.1016/S0168-583X(97)00637-X
1998-01-01
Abstract:CeO2 thin films were grown on (1 0 0) silicon substrates by pulsed laser deposition. X-ray diffraction results indicated that fully (1 1 1) oriented and highly (1 0 0) oriented CeO2 films on Si(1 0 0) were achieved, respectively. Oxygen pressure was found to be important to control the crystallographic orientation. A possible mechanism was proposed to explain these results. Auger electron spectroscopy and Rutherford backscattering spectrometry analysis showed an uniform concentration distribution of Ce and O throughout the epitaxial layer independent of the oxygen pressure. The electrical properties of the films were characterized by capacitance-voltage measurements. (C) 1998 Elsevier Science B.V.
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