Epitaxial growth of CeO2(1 0 0) films on Si(1 0 0) substrates by dual ion beams reactive sputtering

Kang Jin-Feng,GuangCheng Xiong,GuiJun Lian,Yangyuan Wang,Ruqi Han
DOI: https://doi.org/10.1016/S0038-1098(98)00353-6
IF: 1.934
1998-01-01
Solid State Communications
Abstract:The epitaxial growth of CeO2(1 0 0) films on (1 0 0) silicon substrates by dual ion beams sputtering was studied. The measurements of X-ray θ-2θ pattern, φ-scan and rocking curve indicated that the CeO2 films had good epitaxial characteristics with (1 0 0) orientation. The experiments showed that the substrate temperature had only a weak influence on the orientation in a wide temperature range. In contrast to this, the oxygen pressure during the deposition had a strong influence on the growth. © 1998 Published by Elsevier Science Ltd.
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