Investigation of Growth, Structural and Optical Properties of CeO2 Nanocrystalline Thin Films Prepared by Pulsed Spray-Evaporation Chemical Vapor Deposition (PSE-CVD)

Yinzhu Jiang,Naoufal Bahlawane
DOI: https://doi.org/10.1166/nnl.2009.1026
2009-01-01
Nanoscience and Nanotechnology Letters
Abstract:Cerium dioxide (CeO2) nanocrystalline thin films were grown on glass substrates by pulsed-spray evaporation chemical vapor deposition (PSE-CVD) at temperatures of 350-500 degrees C. The X-ray diffraction (XRD) analysis shows that films grown by this process crystallize in the cubic structure, with a preferred (200) orientation when grown above 450 degrees C. The crystallite size was observed to increase from 7.5 nm to 35 nm with increased deposition temperature. The growth activation energy changes from 50.2 kJ/mol in the range of 350-450 degrees C to 22.9 kJ/mol at 450-550 degrees C, indicating the change of the rate-limiting step from surface kinetics control to diffusion control. Scanning electron microscopy (SEM) analysis shows uniform surface morphology for films prepared at the substrate temperatures of 400-500 degrees C. These films exhibit high transparency and band gap energies that are comparable to that of the bulk material (3.2 eV).
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