Observation of B segregation on Si(113) by scanning tunneling microscopy

Zhaohui Zhang,Koji Sumitomo,Feng Lin
DOI: https://doi.org/10.1016/j.ultramic.2005.06.012
IF: 2.994
2005-01-01
Ultramicroscopy
Abstract:We implanted B atoms in Si(113) and annealed the samples to make B segregate to the surface. A series of Si(113)-3×1:B surfaces with different B-induced features have been observed by scanning tunneling microscopy. It is demonstrated that on a Si(113) surface B is favorable to be self-interstitials underneath a type of surface reconstructing blocks called pentamers and such pentamers can be boronized with different numbers of B atoms and therefore appear at different levels of electronic states.
What problem does this paper attempt to address?