Development of Lightweight Silicon Carbide Mirror

DENG Qing,XIAO Peng,XIONG Xiang

DOI: https://doi.org/10.3321/j.issn:1005-023x.2007.02.002

2007-01-01

Abstract:Some of the preferred characteristics for an optical mirror material include low density, high elastic modulus, low coefficient of thermal expansion, and high thermal conductivity. In this paper, the physical and mechanical properties of different materials of optical mirror are compared. Silicon carbide(SiC) has long been recognized as an attractive mirror material due to its superior mechanical and thermal properties when compared to conventional optical materials. The fabrication process and application of silicon carbide mirror are presented. Reaction sintering process and hot isostatic pressing(HIP) are considered to be the suitable way for preparing SiC mirror substrate materials, and chemical vapor deposition(CVD) is suitable to be used in densification of substrate material and preparing SiC coating. Reaction sintering process combined with CVD is an effective and low cost process of preparing SiC mirror materials.