Abstract:Silicon carbide is a new type of optics material developed in recent years because it offered some advantages over other traditional optical substrate materials such as low density, low thermal expansion coefficient, high thermal conductivity, big special heat, big modulus of elasticity and potential cost and schedule. So in this paper, the silicon carbide space mirror was fabricated by both reaction bonded (RB) and chemical vapor deposition (CVD) process. The green body of the space mirror was prepared by silicon carbide powder, carbon powder, dilution and solidified agent using slip casting method. The space mirror blank was prepared by green body and pure silicon powder. They were laid in vacuum sintering furnace and sintered at 1500 degrees C. In this temperature, silicon was melting then infiltrated in SiC green body and reacted with carbon to generate the new SiC, at the same time, bonded original SiC powder, in the end, the nonporous SiC/Si space mirror blank was fabricated. The reaction bonded silicon carbide (RBSiC) was consistent with original SiC powder, new generated SiC and unreacted Si. Because RBSiC was SiC/Si two-phase structure, the hardness difference between SiC and Si made the space mirror difficult to achieve precision optical surface by grinding. So a full density SiC thin film was coated on the surface of space mirror blank with RBSiC by chemical vapor deposition (CVD) process. The raw material was CH3SiCl3. The hydrogen (H2) was catalyst. The deposition temperature was 1300 degrees C. The cooling rate could be controlled. The SiC space mirror was honeycomb open back lightweight structure. The honeycomb cellar could be triangle, rectangle, hexogen and sector. The biggest diameter of SiC space mirror blank which has been fabricated is approach one meter by forgoing process. In order to the forgoing process was feasible, a flat round SiC space mirror with 250mm diameter. The space mirror was composed of a 4mm thick round plane faceplate and hexagonal cellar honeycomb strengthen ribs. The 20 mu m thick SiC thin film was coated on the plate by CVD process. The microstructure of SiC was studied by metalogragh and scanning electronic microscope (SEM). X-ray diffraction showed that RBSiC was composed of alpha-SiC and Si, and the CVD-SiC was beta-SiC.

Spherical Mirror and Surface Patterning on Silicon Carbide (SiC) by Material Removal Rate Enhancement Using CO2 Laser Assisted Polishing

Chemical Mechanical Polishing of Micro-structures on SSiC

High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing

Surface Micromorphology and Nanostructures Evolution in Hybrid Laser Processes of Slicing and Polishing Single Crystal 4H-Sic

Large-scale fabrication of lightweight Si/SiC ceramic composite optical mirror

Material Removal Capability and Profile Quality Assessment on Silicon Carbide Micropillar Fabrication with a Femtosecond Laser.

Laser Assisted Surface Conditioning of a Residual Pattern on Single Crystal Silicon Induced by Ultra-Precision Cutting

Influence of surface morphology and processing parameters on polishing of silicon carbide ceramics using femtosecond laser pulses

Potential material for fabricating optical mirrors: polished diamond coated silicon carbide.

Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

Design And Fabrication Of Large-Scale Lightweight Sic Space Mirror

Grinding of silicon carbide for optical surface fabrication, Part 1: surface analysis

Process Chain for Ultra-Precision and High-Efficiency Manufacturing of Large-Aperture Silicon Carbide Aspheric Mirrors

A Study on the Material Removal Characteristics and Damage Mechanism of Lapping for Pressureless Sintered Silicon Carbide (SSiC) Microlens Cavity

Design, Fabrication and Testing of Space-Borne SiC Mirror

Study of Femtosecond Laser Ablation and Polishing Process on 4H-SiC Substrate

The ablation behavior and modification mechanism of SiC under different laser energy

Development and characterization of silicon dioxide clad silicon carbide optics for terrestrial and space applications

Mechanism and morphology control of underwater femtosecond laser microgrooving of silicon carbide ceramics.

High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser

Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC