Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser

Femtosecond Laser Nanostructuring on a 4H-Sic Surface by Tailoring the Induced Self-Assembled Nanogratings

Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Surface Micromorphology and Nanostructures Evolution in Hybrid Laser Processes of Slicing and Polishing Single Crystal 4H-Sic

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

Centimeter-scale low-damage micromachining on single-crystal 4H–SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots

Femtosecond laser two-beam interference applied to 4H-SiC surface hierarchical micro-nano structure fabrication

Laser slicing of 4H-SiC wafers based on picosecond laser-induced micro-explosion via multiphoton processes

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography

Microstructure evolution and ablation mechanism of SiCf/SiC ceramic matrix composite microgrooves processed by pico-second laser

Investigation of structural transformation and residual stress under single femtosecond laser pulse irradiation of 4H–SiC

Experimental and Simulation Research on Femtosecond Laser Induced Controllable Morphology of Monocrystalline SiC

Ultrafast pulsed laser stealth dicing of 4H-SiC wafer: Structure evolution and defect generation

Experimental Study on the Influence of Ultraviolet Laser Parameters on the Microstructure Machining Quality of Silicon Carbide Ceramic

High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching

Fabrication of 4H–SiC microvias using a femtosecond laser assisted by a protective layer

High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Study of Femtosecond Laser Ablation and Polishing Process on 4H-SiC Substrate