Effect Of Post-Annealing On The Magnetic Properties Of Bi : Yig Film By Rf Magnetron Sputtering On Si Substrates

Qinghui Yang,Zhang Huaiwu,Liu Yingli,Wen Qiye

DOI: https://doi.org/10.1109/TMAG.2007.900979

IF: 1.848

2007-01-01

IEEE Transactions on Magnetics

Abstract:We deposited amorphous Bi:YIG film on Si substrates by radio-frequency (RF) magnetron sputtering and crystallized it by the recurrent rapid thermal annealing (RRTA) method. We studied the effects of heating temperature on the crystallization, surface condition, and magnetic properties of the films using X-ray diffraction, an atomic force microscope, and a vibrating sample magnetometer. We also examined the effects of atmosphere and the recurrent-period on the films. Our results show that the RRTA method yields film with good magnetic properties, with saturation magnetization of 1750 Gs and coercive force of 80 Oe and good surface condition.