Effect of Annealing Temperature on Properties of Co-Sputtered Bi2Te3

Yang Liu
DOI: https://doi.org/10.1088/1757-899x/782/2/022041
2020-01-01
IOP Conference Series Materials Science and Engineering
Abstract:Bi2Te3 thin film samples are prepared by magnetron co sputtering. The samples are annealed in a nitrogen atmosphere and were treated at different temperature for 2 h. Effects of annealing temperature on the structure and thermoelectric properties of Bi2Te3 are studied in detail. As the annealing temperature increases, the Te element on the surface begins to volatilize, and some Te elements precipitate and crystallize on the surface, resulting in a decrease in the Te element in the Bi2Te3 thin film. When the annealing temperature is 350 ° C, the power factor of Bi2Te3 film reaches a maximum of 0.21×10−3 Wm−1K−2.
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