Integrated processes of YIG magnetic thin film in low temperature

Liu Feng,Yang Chen,Ren Tianling,Yu Jun
DOI: https://doi.org/10.3321/j.issn:1671-4512.2006.04.001
2006-01-01
Abstract:The primary goal of this research is to survey the application of magnetic YIG thin film to Si IC. Sol-Gel method and rapid thermal process (RTP) were used to fabricate and crystallize Y_ 2.97Bi_ 0.03Fe_5O_ 12 thin films on Si substrates. The optimal parameters for the fabrication of YIG thin films were discussed. Atomic force microscope(AFM), X-ray diffraction(XRD) and alternating gradient magnetometer(AGM) were used to investigate the impact of RTP and Sol-Gel method on the surface topology, crystal structure and static magnetic performance of the thin-film of Y_ 2.97Bi_ 0.03Fe_5O_ 12. The results showed that RTP had little effects on of the thin film′s crystallization temperature, crystal structure and saturated magnetization (M_s), but quite significant impacts on the surface topology, which caused the increase of the coercivity for YIG thin films. It was also found that low-temperature annealing could promote the magnetic properties of the samples effectively.
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