Fabrication of double-sided YBa2Cu3O7_x thin films by the off-axis pulsed-laser deposition

S. Y. XU,B. L. LOW,C. K. ONG,X. ZHANG

DOI: https://doi.org/10.1023/A:1018535520409

1997-01-01

Journal of Materials Science Letters

Abstract:Abstracts are not published in this journal

What problem does this paper attempt to address?

Fabrication and Characterization of Y2O3 Stabilized ZrO2 Films Deposited with Aerosol-Assisted MOCVD

Yinzhu Jiang,Hanfeng Gao,Mingfei Liu,Yanyan Wang,Guangyao Meng

DOI: https://doi.org/10.1016/j.ssi.2006.10.009

IF: 3.699

2007-01-01

Solid State Ionics

Abstract:With Y(DPM)(3) and Zr(DPM)(4) as precursors, yttria-stabilized zirconia (YSZ) thin films were deposited onto NiO-SDC substrates using a modified aerosol-assisted metal-organic chemical vapor deposition (AAMOCVD) apparatus, where high power halogen lights were used as assisted heaters. Cubic structured YSZ was obtained when the films were deposited at 650 degrees C. The cubic YSZ transformed to tetragonal structure after annealed at 1100 degrees C for 3 h, possibly due to crystallite growth. Y/Zr mole ratio of the deposited film depends on the Y/Zr ratio of the precursors, indicating that the thin film composition can be effectively controlled. Scanning electron microscopy (SEM) analysis showed a strong bonding between the films and substrates. Thickness of the film was estimated to be about 9 mu m with a high growth rate of 50 nm/min, which inferring the AAMOCVD is very effective in synthesis of YSZ films. AC impedance analyses showed that the ionic conductivity of the YSZ film is 0.034 S/cm at 800 degrees C, which is slightly less than that of bulk YSZ, and the conduction activation energy (E-a) changed from 80.8 kJ/mol to 138.8 kJ/mol at 640 degrees C with decreasing temperature. (c) 2006 Elsevier B.V. All rights reserved.
Particulate-free A-Yba2cu3o7 − X/la0.5sr0.5coo3/a-Yba2cu3o7 − X Sandwiched Thin Film on (100) SrTiO3 Fabricated by Pulsed Laser Deposition with a Shadow Mask

WB Wu,KH Wong,PW Chan,JT Cheung

DOI: https://doi.org/10.1016/s0167-577x(97)00105-5

IF: 3

1997-01-01

Materials Letters

Abstract:By placing a shadow mask between the target material and substrate, particulate-free YBa2Cu3O7 − x (YBCO) and La0.5Sr0.5CoO3 (LSCO) thin films were deposited by pulsed laser ablation. The self-template method was employed to grow a-axis oriented YBCO films. It was found that the YBCO film deposited directly on (100)SrTiO3 (STO) was composed of both a- and c-axis oriented parts. Using a thin layer of LSCO as the buffer layer, however, pure a-axis oriented YBCO film can be grown on LSCO/(100)STO. In this letter, the growth and structural characterization of heteroepitaxial a-YBCO/LSCO/ a-YBCO trilayer on (100)STO are reported.
The effects of heating and annealing processes on the surface morphology and quality of double-sided YBa 2 Cu 3 O 7−δ thin films

s y xu,c k ong,y l zhou,b l low,l f chen,xiaoe zhang

DOI: https://doi.org/10.1016/S0921-4534(97)01784-X

IF: 1.534

1998-01-01

Physica C: Superconductivity and its Applications

Abstract:A series of YBa2Cu3O7-delta (YBCO) double-sided thin films were prepared by pulsed-laser deposition (PLD) and measured by XRD, SEM, AFM, electrical-transport and microwave surface resistance (R-s) measurements. The results showed that the surface morphology of the first side of the film consisted of more troughs and big particles, while that of the second side of the film consisted of almost no troughs but small, bar-like oriented particles. The difference has been attributed to the heating and annealing processes during deposition. The improved substrate surface conditions for the deposition of the second side of the film led to better film quality in terms of the T-cO and R-s values. Our results implied that a pre-annealing process of the substrates and a proper post-annealing process of the films after deposition would improve the film quality and reduce the difference between the two sides of the YBCO films fabricated by PLD. (C) 1998 Elsevier Science B.V.
Preparation of Superconducting Yba2cu3o7-X Films on Metallic Substrates by Pulsed Laser Deposition

YQ Wang,B Su,XT Huang,QL Wang,CW An,YC Fan,DS Lu

DOI: https://doi.org/10.1117/12.317963

1998-01-01

Abstract:The YBa2Cu3O7-x,(YBCO) superconducting thin films with Tc(R=0) of 84K and Je of 2x10(3)A/cm(2) at 77K, on polycrystalline Ni-based alloys with buffer layers of Yttria-Stabilized-Zirconia (YSZ), have been prepared in situ by excimer laser. The orientation of laser- deposited YSZ buffer layers on NiCr alloys can be improved by choosing the suitable preparing parameters. The microstructure of YBCO thin films, investigated with a scanning tunneling microscopy: shows that the spiral growth structure may be an important characteristic of the high quality YBCO superconducting thin films.
High Quality Superconducting Thin Films by Sputtering

ZW DONG,GR LIU,BC YANG,GC XIONG,QS YANG,ZX ZHAO

DOI: https://doi.org/10.1016/0921-4534(91)91101-9

1991-01-01

Abstract:High quality superconducting thin films of YBaCuO and Bi(Pb)SrCaCuO were reproducibly prepared by ion beam sputtering and rf magnetron sputtering from a single bulk target or a single off-stoichiometry powder target. The substrates with (100) surfaces of YSZ, SrTiO3, LaAlO3 and MgO were used. We review our work on the synthesis of these thin films obtained by both in situ deposition and postannealing method. The details of thin film growth, superconducting properties, morphology, film-substrate interdiffusions, structures and crystallinities were presented and discussed.
MOCVD Derived Double-Sided YBa2Cu3O7−δ Films on Y2O3/YSZ/CeO2 Buffered Textured Metal Substrates

Jie Xiong,Fei Zhang,YuDong Xia,Xin Liu,RuiPeng Zhao,XiaoHui Zhao,BoWan Tao

DOI: https://doi.org/10.1007/s11431-014-5488-2

2014-01-01

Abstract:We have successfully employed metal-organic chemical vapor deposition (MOCVD) technique to simultaneously deposit double-sided YBa 2 Cu 3 O 7− δ (YBCO) films on both sides of Y 2 O 3 /yttria-stabilized zirconia (YSZ)/CeO 2 (YYC) buffered biaxially textured Ni-5 at.% W substrates, which is of great prospect to cut the production cost of YBCO coated conductors. X-ray diffraction analysis revealed that both sides of YBCO film were purely c -axis oriented and highly textured. The ω -scan of (005) YBCO and ϕ -scan of (103) YBCO yielded full width at half maximum (FWHM) values of 4.9° and 6.6° for one side of double-sided YBCO film, respectively, as well as 4.4° and 6.4° for the other side. The current transportation measurements performed on such double-sided 500 nm-thickness YBCO films showed the self-field critical current density ( J c ) at 77 K of 0.6 MA/cm 2 and 1.2 MA/cm 2 , respectively. Further research is in the process of exploring new solution to improve the J c in practice.
Double-sided Reel-to-reel Metal-Organic Chemical Vapor Deposition System of YBa2Cu3O7-δ Thin Films

Fei Zhang,Jie Xiong,Xin Liu,Ruipeng Zhao,Xiaohui Zhao,Bowan Tao,Yanrong Li

DOI: https://doi.org/10.1116/1.4884367

2014-01-01

Abstract:Two-micrometer thick YBa2Cu3O7-δ (YBCO) films have been successfully deposited on both sides of LaAlO3 single crystalline substrates by using a home-made reel-to-reel metal-organic chemical vapor deposition (MOCVD) system, which has two opposite symmetrical shower heads and a special-designed heater. This technique can simultaneously fabricate double-sided films with high deposition rate up to 500 nm/min, and lead to doubling current carrying capability of YBCO, especially for coated conductors (CCs). X-ray diffraction analysis showed that YBCO films were well crystallized and highly epitaxial with the full width at half maximum values of 0.2° ∼ 0.3° for the rocking curves of (005) YBCO and 1.0° for Φ-scans of (103) YBCO. Scanning electron microscope revealed dense, crack-free, slightly rough surface with Ba-Cu-O precipitates. The films showed critical current density (Jc, 77 K, 0 T) of about 1 MA/cm2, and overall critical current of 400 A/cm, ascribed to the double-sided structure. Our results also demonstrated that the temperature and composition in the deposition zone were uniform, which made MOCVD preparation of low cost and high performance double-sided YBCO CCs more promising for industrialization.
Insitu Fabrication Of Ybco/Ysz/Si Thin-Films By Laser Ablation

Yaogang Zhang,Shoushan Fan,Changqing Shi,Zhichuan Niu,Binglin Gu

DOI: https://doi.org/10.1016/0921-4534(91)91123-L

1991-01-01

Abstract:Yttria-Stabilized Zirconia (YSZ) and YBa2Cu3O7-delta were ablated sequentially by a XeCl excimer laser and deposited on Si(100) substrate heated to temperatur of 650-degrees-C to in-situ fabricate high T(c) superconducting YBCO/YSZ/Si thin films. The zero resistance temperature of the deposited film was measured to be 85K by four-point method. The X-ray diffraction pattern of the film shows that it has strong c-axis orientation normal to the film surface. RBS and AES profile analysis were used to determine the chemical composition, thickness and interfaces of the multilayers.
Fabrication of Micro and Submicro Y-Ba-Cu-O Particles by Excimer Laser Processing

GP Luo,CL Chen,SY Chen,J Shen,YS Wang,YY Sun,CW Chu,Y Liou,NB Ming

DOI: https://doi.org/10.1116/1.1286716

2000-01-01

Abstract:We have investigated the crystallization of amorphous Y–Ba–Cu–O films with pulsed laser irradiation. The Y–Ba–Cu–O films were prepared on Si (001) substrates by pulsed laser deposition at room temperature. The microstructure and surface morphology of the films during the crystallization process were studied by x-ray diffraction and scanning electron microscopy. Micro or submicro Y–Ba–Cu–O crystalline particles can be obtained with variant laser pulses and energy densities. The particles have half-spherical or even spherical shapes on the film surfaces, and the saturated particle sizes were found to be determined by the film thickness.
Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

H ZHANG,ZJ SUN,SZ YANG,ZM JI,PH WU,SY ZHANG,HC ZHANG,Y HANG

DOI: https://doi.org/10.1116/1.578740

1993-01-01

Abstract:Using facing targets and off-axis direct-current magnetron sputtering, we have prepared high quality YBa2Cu3O7-x (YBCO) superconducting thin films on ZrO2 (100) with T(c) less-than-or-equal-to 90 K (R = 0) and J(c) as high as 1.6 X 10(6) A/cm2 (78 K, zero magnetic field) over an area of 70 mm diameter. Over this large area, the fluctuations of T(c) and film thickness are from less than +0.9% to -1.3% and from +6.3% to -10%, respectively. In this article, also discussed are the differences between two sputtering modes used in our experiments, one of which gives larger area of superconducting thin film, higher deposition rate, and better thickness uniformity than the other. It is found that the smoothness and the temperature uniformity of the substrate holder are a of extreme importance for the fabrication of large area superconducting thin films. An electroquartz with little deformation during deposition has turned out to be very successful as the substrate holder in our fabrication.
Fabrication of Large Area Superconducting Thin Film by Pulsed Laser Scanning

QL Wang,CW An,WD Song,SS Oh,KS Ryu,DY Jeong

DOI: https://doi.org/10.1109/77.784944

IF: 1.9489

1999-01-01

IEEE Transactions on Applied Superconductivity

Abstract:In order to deposit high quality high temperature superconducting (HTS) YBCO thin films with a large area, the pulsed laser scanning (PLS) method was tried and the thickness distribution of the film was investigated. Large area YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films on /spl phi/ 36 mm diameter LaAlO/sub 3/ and /spl phi/ 42 mm diameter Y-ZrO/sub 2/ (YSZ) single crystal substrates were obtained by rotating lenses with radii of 9 and 12.9 mm. The critical temperatures T/sub c/ of the films at the center and edge were all 90 K. The critical current density J/sub c/ at 77 K and zero magnetic field is over 10/sup 6/ A/cm/sup 2/. X-ray diffraction showed that the thin films are completely c-axis oriented. The V-I characteristics of the thin films were also investigated.
Fabrication of YBaCuO Micro-Particles by Excimer Laser Processing

GP Luo,CL Chen,YY Sun,CW Chu

DOI: https://doi.org/10.1016/s0921-4534(00)01072-8

2000-01-01

Abstract:Periodical distribution of YBaCuO particles were obtained on amorphous YBaCuO films with 5–20 laser pulses in the energy density of 0.1 J/cm2. X-ray diffraction patterns showed that the particles were polycrystalline. Scanning electron microscopy studies revealed that half-spherical or even spherical particles were formed on the films. The diameters of the YBaCuO particles were found to be dependent on film thickness, and sub-micro YBaCuO spherical particles with diametrs of 250 nm have been obtained in 200 nm-thick YBaCuO films.
YBCO Superconducting Thin Film Preparation on Metallic Substrates by Laser

Youqing Wang,Biao Su,Qiuliang Wang,Chengwu An,Yongchang Fan,Xintang Huang,Dongsheng Lu

DOI: https://doi.org/10.3321/j.issn:0253-2239.1999.05.012

1999-01-01

Abstract:YBa2Cu3O7-x (YBCO) superconducting thin films with a transition temperature (electric resistance is zero) of 84 K and a critical electric current density of 2000 A/cm2 at 77 K on polycrystalline Ni-based alloys with buffer layers of yttria-stabilized-zirconia (YSZ) were prepared in situ by excimer laser and primarily c-axis oriented. The orientation of laser-deposited YSZ buffer layers on NiCr alloys can be improved by selecting proper preparing parameters. The microstructure of the films shows that the spiral growth structure may be an important feature of the films with high quality.
Properties of Oriented Oxide Superconductor Thin Films Prepared by Pulsed Laser Evaporation from High Tc Bulk Material

D. Dijkkamp,X. D. Wu,S. B. Ogale,A. Inam,E. W. Chase,P. Miceli,J. M. Tarascon,T. Venkatesan

DOI: https://doi.org/10.1007/978-1-4613-1937-5_82

1987-01-01

Abstract:We report on the preparation of thin films of Y-Ba-Cu-O superconductors using pulsed excimer laser evaporation of bulk material. Rutherford back-scattering spectrometry showed the composition of these films to be close to that of the bulk material. Growth rates were typically 1 nm per laser shot. This new deposition method is relatively simple, very versatile, and does not require the use of ultrahigh vacuum techniques. After an annealing treatment in oxygen the films exhibited superconductivity with zero resistance in the range 55 K – 85 K, depending on the annealing conditions and the type of substrate. In particular, films prepared on SrTiO3〈l00〉 showed transition widths as narrow as 2 K, and a considerable amount of orientation, as observed by X-ray diffraction and ion channeling techniques. There is evidence for strong interface reaction with in-diffusion of Ba and Cu and out-diffusion of Ti and Sr, resulting in a thickness dependence of the superconducting properties of the films.
HIGH Tc SUPERCONDUCTING THIN FILMS BY CHEMICAL SPRAY DEPOSITION

Guang-yao Meng,Xian-dong Wang,Xue-jun Chen,Pei-zhen Fu,Pinghua Yang,Ding-kun Peng,Fan-qing Li,Wei-de Zhang,Gui-en Zhou,Jun Wang,Yu-heng Zhang

DOI: https://doi.org/10.1142/s0217979287000918

1987-01-01

International Journal of Modern Physics B

Abstract:A Chemical spray deposition process with mixed nitrate solution as source was developed to prepare thin films of Ba-Y-Cu oxide on sapphire substrate. By adjusting the source composition and deposition conditions, we have successfully obtained the films in thickness of 2–15μm with essentially orthorhombic Ba 2 YCu 3 O 7 phase. The films behave super conducting transition with onset above 90K and zero resistance at 68.4K to date. It is believed that the tails in the resistance transition can be improved by searching proper heat treatment and using suitable substrates such as ZrO 2 and SrTiO 3 .
Preparation of high crystalline YBCO superconducting thin films by PLD

Jiangshan Xu,Hao Chen,Zigang Zhou

DOI: https://doi.org/10.1117/12.3017457

2024-01-15

Abstract:In this paper, YBCO superconductor target material was prepared by solid phase synthesis and YBCO thin film with high crystallinity was prepared by pulsed laser deposition. The oxygen content of YBa2Cu3O7-x target can reach 6.8 by adopting pressure holding, in situ annealing and other measures during the sintering process, which belongs to the orthogonal superconducting phase. The effects of substrate inclination Angle and film thickness on crystal properties of YBCO superconducting thin films by pulsed laser deposition were investigated by using the prepared target material. The results show that the sample with a thickness of 500nm and a substrate tilt Angle of 15 degrees has the fewest pores, the densest films and the best crystallinity. It can produce a voltage response of 9mV in 9ms under the laser response of 1Mhz, and has good photoelectric response characteristics. This paper will have potential application value in the field of heat flow sensor, laser power meter and other functional devices.

Physics,Engineering,Materials Science
Progress in Research of Double-Sided Coated Conductors

ZHAO Xiaohui,TAO Bowan,XIONG Jie,LIU Xingzhao,LI Yanrong

2011-01-01

Abstract:High quality long double-sided Y2O3 seed layer was prepared with reactive sputtering method.The water vapor was used to form yttrium oxide thin film while avoiding the oxidation of the RABiTS substrate.And high quality Y2O3 seed layer was successfully fabricated.The full widths at half maximum of in-plane and out-of-plane rocking curves of the Y2O3 seed layer were only 3.8° and 1.4°,respectively.The texture of the seed layer was much better than that of the metallic substrate.The surface roughness(RMS) is 2.8 nm.YSZ barrier layer and CeO2 cap layer were sputtered consequently on top of the Y2O3 seed layer.The film surface is smooth and crack free.Both the microstructure and surface morphology of the buffer layer is uniform along the tape length on both sides.YBCO superconducting layer was prepared with inverted cylindrical opposited target sputtering.Using rotation and automatic back and forth movement along the axis,the uniformity of the film is improved.High quality double-sided coated conductors with Ic over 400 A/cm-width in short sample,and Ic>210 A/cm-width in 1m long tape were successfully fabricated.
Fabrication Of Two Domain Cu2o(011) Films On Mgo(001) By Pulsed Laser Deposition

Yajun Fu,Hongwei Lei,Xuemin Wang,Dawei Yan,Linhong Cao,Gang Yao,Changle Shen,Liping Peng,Yan Zhao,Yuying Wang,Weidong Wu

DOI: https://doi.org/10.1016/j.apsusc.2013.01.019

IF: 6.7

2013-01-01

Applied Surface Science

Abstract:Single oriented Cu2O(0 1 1) films were fabricated on MgO(0 0 1) substrates at temperature from 450 to 600 degrees C by pulsed laser deposition. In situ X-ray photoelectron spectroscopy and X-ray induced Auger electron spectroscopy showed that the oxidation state of Cu should be Cu1+. In situ reflection high-energy electron diffraction, ex situ X-ray diffraction and cross-sectional transmission electron microscopy have been used to characterize the structural properties of deposited Cu2O films. The coexistence of two kinds of domains in the Cu2O films was observed. The in-plane orientation relationships for the two kinds of domains are Cu2O[1 0 0]parallel to MgO[1 1 0] and Cu2O[1 0 0]parallel to MgO[1-1 0], respectively. The formed rotation domains, which perpendicular to each other, can be attributed to the mismatch of rotational symmetry at interface between Cu2O and MgO. The strip-like surface morphology of Cu2O films was investigated by atomic force microscopy and scanning electron microscopy. The band gap of Cu2O films was determined by using the linear extrapolation method. (C) 2013 Elsevier B. V. All rights reserved.
Improvement of Surface Morphology of Yttrium-Stabilized Zirconia Films Deposited by Pulsed Laser Deposition on Rolling Assisted Biaxially Textured Substrate Tapes

Wang Meng-Lin,Liu Lin-Fei,Li Yi-Jie

DOI: https://doi.org/10.1088/0256-307x/32/11/116802

2015-01-01

Chinese Physics Letters

Abstract:The surface morphology of buffer layer yttrium-stabilized zirconia (YSZ) of YBa2Cu3O7-sigma (YBCO) high temperature superconducting films relies on a series of controllable experimental parameters. In this work, we focus on the influence of pulsed laser frequency and target crystalline type on surface morphology of YSZ films deposited by pulsed laser deposition (PLD) on rolling assisted biaxially textured substrate tapes. Usually two kinds of particles are observed in the YSZ layer: randomly distributed ones on the whole film and self-assembled ones along grain boundaries. SEM images are used to prove that particles can be partly removed when choosing dense targets of single crystalline. Lower frequency of pulsed laser also contributes to a smoother film surface. TEM images are used to view the crystalline structure of thin film. Thus we can obtain a basic understanding of how to prepare a particle-free YSZ buffer layer for YBCO in optimized conditions using PLD. The YBCO layer with nice structure and critical current density of around 5MA/cm(2) can be reached on smooth YSZ samples.
Investigation of the Evolution of YBa2Cu3O7-x Films Deposited on MgO and STO Substrates

XIE Ting-ming,TAO Bo-wan,XIONG Jie,CHEN Jia-jun,LIU Xing-zhao,LI Yan-rong

DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.03.004

2005-01-01

Abstract:YBa2Cu3O7-x (YBCO) high temperature superconductor thin films with sequential thickness ranging from 2 to 200 nm on MgO and SrTiO3 substrates has been systematically investigated with atomic force microscopy (AFM) and XRD to study the growth methnisms prepared by inverted cylindrical DC sputtering method. Combined with out-of-plane rotation with in-plane rotation together, this system has been used to in-situ deposit films on separated substrates under essentially identical deposition.

Fabrication of double-sided YBa2Cu3O7_x thin films by the off-axis pulsed-laser deposition

Fabrication and Characterization of Y2O3 Stabilized ZrO2 Films Deposited with Aerosol-Assisted MOCVD

Particulate-free A-Yba2cu3o7 − X/la0.5sr0.5coo3/a-Yba2cu3o7 − X Sandwiched Thin Film on (100) SrTiO3 Fabricated by Pulsed Laser Deposition with a Shadow Mask

The effects of heating and annealing processes on the surface morphology and quality of double-sided YBa 2 Cu 3 O 7−δ thin films

Preparation of Superconducting Yba2cu3o7-X Films on Metallic Substrates by Pulsed Laser Deposition

High Quality Superconducting Thin Films by Sputtering

MOCVD Derived Double-Sided YBa2Cu3O7−δ Films on Y2O3/YSZ/CeO2 Buffered Textured Metal Substrates

Double-sided Reel-to-reel Metal-Organic Chemical Vapor Deposition System of YBa2Cu3O7-δ Thin Films

Insitu Fabrication Of Ybco/Ysz/Si Thin-Films By Laser Ablation

Fabrication of Micro and Submicro Y-Ba-Cu-O Particles by Excimer Laser Processing

Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

Fabrication of Large Area Superconducting Thin Film by Pulsed Laser Scanning

Fabrication of YBaCuO Micro-Particles by Excimer Laser Processing

YBCO Superconducting Thin Film Preparation on Metallic Substrates by Laser

Properties of Oriented Oxide Superconductor Thin Films Prepared by Pulsed Laser Evaporation from High Tc Bulk Material

HIGH Tc SUPERCONDUCTING THIN FILMS BY CHEMICAL SPRAY DEPOSITION

Preparation of high crystalline YBCO superconducting thin films by PLD

Progress in Research of Double-Sided Coated Conductors

Fabrication Of Two Domain Cu2o(011) Films On Mgo(001) By Pulsed Laser Deposition

Improvement of Surface Morphology of Yttrium-Stabilized Zirconia Films Deposited by Pulsed Laser Deposition on Rolling Assisted Biaxially Textured Substrate Tapes

Investigation of the Evolution of YBa2Cu3O7-x Films Deposited on MgO and STO Substrates