Fabrication of YBaCuO Micro-Particles by Excimer Laser Processing

GP Luo,CL Chen,YY Sun,CW Chu
DOI: https://doi.org/10.1016/s0921-4534(00)01072-8
2000-01-01
Abstract:Periodical distribution of YBaCuO particles were obtained on amorphous YBaCuO films with 5–20 laser pulses in the energy density of 0.1 J/cm2. X-ray diffraction patterns showed that the particles were polycrystalline. Scanning electron microscopy studies revealed that half-spherical or even spherical particles were formed on the films. The diameters of the YBaCuO particles were found to be dependent on film thickness, and sub-micro YBaCuO spherical particles with diametrs of 250 nm have been obtained in 200 nm-thick YBaCuO films.
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