Insitu Fabrication Of Ybco/Ysz/Si Thin-Films By Laser Ablation

Yaogang Zhang,Shoushan Fan,Changqing Shi,Zhichuan Niu,Binglin Gu
DOI: https://doi.org/10.1016/0921-4534(91)91123-L
1991-01-01
Abstract:Yttria-Stabilized Zirconia (YSZ) and YBa2Cu3O7-delta were ablated sequentially by a XeCl excimer laser and deposited on Si(100) substrate heated to temperatur of 650-degrees-C to in-situ fabricate high T(c) superconducting YBCO/YSZ/Si thin films. The zero resistance temperature of the deposited film was measured to be 85K by four-point method. The X-ray diffraction pattern of the film shows that it has strong c-axis orientation normal to the film surface. RBS and AES profile analysis were used to determine the chemical composition, thickness and interfaces of the multilayers.
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