Abstract:Using a novel DC magnetron sputtering system, high quality YBa2Cu3O7-delta (YBCO) thin films were deposited on both sides of twelve pieces of 3-inch LaAlO3(001) single crystal substrates in one batch. This sputtering system has a rotatable disc sample holder with the LaAlO3 substrates being positioned in the middle of upper and lower YBCO targets. These two sputter guns are arranged to simultaneously deposit YBCO thin films on both sides of the substrate. The rotatable sample holder is an important approach to large scale deposition of high quality YBCO thin films. In this manner, the sputtered species can diffuse well around the substrates during one rotation cycle. Furthermore, the anode is installed in the inner of rotatable disc sample holder to avoid negative ion bombardment. Thus, a good uniformity over the whole area for all the films has been realized. The full-width at half-maximum (FWHM) values of the (005) rocking curves typically range from 0.49 degrees to 0.56 degrees. The superconducting critical temperatures fall in the range of 89-90 K and the critical current densities are between 3.75 and 4.0 MA cm(-2) at 77 K. The microwave surface resistance, R-S (77 K, 10 GHz), of the YBCO thin films range typically from 0.56 to 0.71 m Omega, which make these films suitable for microwave applications.

High Quality Superconducting Thin Films by Sputtering

Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

Superconducting Characteristics and Epitaxial-Growth Analyses of YBa2Cu3O7−x Thin Films by Direct-Current Magnetron Sputtering

Superconducting properties and structural perfection of epitaxial YBa 2 Cu 3 O 7- x thin films

Single-target Sputter Deposition, Post-Processing and Electron Spectroscopy of Perovskite Superconductor Thin Films

GROWTH AND PROPERTIES OF YBCO SUPERCONDUCTING THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING FROM A PAIR OF SUPERCONDUCTING STOICHIOMETRIC YBCO TARGETS

Studies of high temperature superconducting thin films by transmission electron microscopy

Preparation of YBa2Cu3O7−δ Thin Films by Magnetron Sputtering with I N S I T U Plasma Oxidation

Preparation and characterization of YBCO thin films by plane target sputtering

Preparation of Superconducting Yba2cu3o7-X Films on Metallic Substrates by Pulsed Laser Deposition

100 K (bi, Pb)-Sr-Ca-Cu-O Superconducting Films Produced by RF Magnetron Sputtering and Post Annealing

Enhancing Superconductivity of Ultrathin YBa2Cu3O7-δ Films by Capping Non-Superconducting Oxides*

HIGH Tc SUPERCONDUCTING THIN FILMS BY CHEMICAL SPRAY DEPOSITION

Enhancing superconductivity of ultrathin YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> films by capping non-superconducting oxides*

Investigation of the Evolution of YBa2Cu3O7-x Films Deposited on MgO and STO Substrates

Epitaxial Growth of YBa2Cu3O7−x Thin Films on Si(100) with Zirconia Buffers of Varying Crystalline Quality and Structure

Epitaxial growth of Bi 2 Sr 2−x La x CuO 6+δ thin films by RF-magnetron sputtering

Batch Production of Large-Area Double-Sided Yba2cu3o7-Delta Thin Films by Dc Magnetron Sputtering

Fabrication of Large Area Superconducting Thin Film by Pulsed Laser Scanning

Preparation of high crystalline YBCO superconducting thin films by PLD

Improvement of Surface Morphology of Yttrium-Stabilized Zirconia Films Deposited by Pulsed Laser Deposition on Rolling Assisted Biaxially Textured Substrate Tapes