100 K (bi, Pb)-Sr-Ca-Cu-O Superconducting Films Produced by RF Magnetron Sputtering and Post Annealing

TS CHIN,SL LIN,C TIEN,TW HUANG,MP HUNG
DOI: https://doi.org/10.1088/0953-2048/3/6/007
1990-01-01
Abstract:Superconducting (Bi, Pb)-Sr-Ca-Cu-O films with Tc above 100 K were reproducibly obtainable by single-target RF magnetron sputtering and post annealing on a magnesia (100) substrate. Several targets were tried; the Bi20Pb3Sr16Ca25Cu36Ox was found to be optimum. The effect of three different annealings on the evolution of phases, microstructure and Tcs of the films was explored. Annealing with film facing down on top of a Bi19.5Pb3.5Sr22Ca22Cu33Ox bulk at 845 degrees C resulted in the best results. Optimum process parameters are presented.
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