Abstract:In view of the promising role of the MOCVD technique in the advance of YBCO high- T c superconducting thin films grown for device applications, a simplified chemical vapor deposition system with a single mixed organometallic precursor was built and tested. Single phase YBa 2 Cu 3 O 7-δ films with T c values around 90 K were readily obtained on (100) YSZ and (100) MgO substrates with a normal precursor mass transport. Investigations indicate that, in addition to the gas phase stoichiometry as a major factor, the phase composition and crystallite orientations of the YBCO films were considerably affected by the oxidation agent (partial pressure and concentration) as well as the substrate temperature. The films could be either highly oriented (00 l ) or (100) and / or (110) orientation dominated. A single phase Y 2 Cu 2 O 5 film with (002) orientation was obtained from a Ba deficient gas phase. The variation in superconducting behavior of the YBCO thin films deposited under different conditions was not only related to these phases but also to the growth orientation. The film uniformity and flatness are examined and discussed in terms of the gas flow pattern in the reactor.

Y-Ba-Cu-O Superconducting Films Grown on (100) Magnesia and Sapphire Substrates by A Melt Growth Method Without Crucible

A Crucibleless Liquid Phase Growth Method of Preparing the Y-Ba-Cu-0 Superconducting Films

Preparation of YBCO superconducting thick films On MgO substrates by modified melt growth process

YBa2Cu3O7−y and YbBa2Cu3O7−y Superconducting Films Prepared by Chemical Solution Deposition on SrTiO3 (001) Substrate

Superconducting Characteristics and Epitaxial-Growth Analyses of YBa2Cu3O7−x Thin Films by Direct-Current Magnetron Sputtering

High Tc Superconducting HgBa2CaCu2Oy Films Growth on the YZrO2 Substrates with YBa2Cu3O7 Buffer Layers

HIGH Tc SUPERCONDUCTING THIN FILMS BY CHEMICAL SPRAY DEPOSITION

Enhancing superconductivity of ultrathin YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> films by capping non-superconducting oxides*

Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

Growth of Cubic MgxZn1-xO Films and Characterization

Growth of HgBa2CaCu2Oy films with a buffer layer

Superconducting properties and structural perfection of epitaxial YBa 2 Cu 3 O 7- x thin films

Enhancing Superconductivity of Ultrathin YBa2Cu3O7-δ Films by Capping Non-Superconducting Oxides*

SUPERCONDUCTIVITY AND CRYSTALLINITY IN EPITAXIAL THIN FILMS OF <font>YBa</font><sub>2</sub><font>Cu</font><sub>3</sub><font>O</font><sub>y</sub> GROWN ON <font>Eu</font><sub>2</sub><font>CuO</font><sub>4</sub>/<font>YSZ</font> DOUBLE BUFFERED SILICON

Formation and Characterization of YBa2Cu3O7−δ High-Tc Thin Films by MOCVD with Single Mixed Precursor

MgB2 Superconducting Films Fabricated on Copper Substrate by Hybrid Physical-Chemical Vapor Deposition

100 K (bi, Pb)-Sr-Ca-Cu-O Superconducting Films Produced by RF Magnetron Sputtering and Post Annealing

Fabrication of Superconducting YBa2Cu4O8 Film via Coprecipitation

STUDY OF THE PREPARATION OF HIGH Tc SUPERCONDUCTING YBCO THIN FILMS BY A PLASMA-ASSISTED MOCVD PROCESS

GROWTH AND PROPERTIES OF SUPERCONDUCTING MgB_2 THIN FILM FABRICATED ON Al_2O_3 SUBSTRATE BY HYBRID PHYSICAL CHEMICAL VAPOR DEPOSITION

SUPERCONDUCTIVITY AND CRYSTALLINITY IN EPITAXIAL THIN FILMS OF YBa2Cu3Oy GROWN ON Eu2CuO4/YSZ DOUBLE BUFFERED SILICON