Abstract:In view of the promising role of the MOCVD technique in the advance of YBCO high- T c superconducting thin films grown for device applications, a simplified chemical vapor deposition system with a single mixed organometallic precursor was built and tested. Single phase YBa 2 Cu 3 O 7-δ films with T c values around 90 K were readily obtained on (100) YSZ and (100) MgO substrates with a normal precursor mass transport. Investigations indicate that, in addition to the gas phase stoichiometry as a major factor, the phase composition and crystallite orientations of the YBCO films were considerably affected by the oxidation agent (partial pressure and concentration) as well as the substrate temperature. The films could be either highly oriented (00 l ) or (100) and / or (110) orientation dominated. A single phase Y 2 Cu 2 O 5 film with (002) orientation was obtained from a Ba deficient gas phase. The variation in superconducting behavior of the YBCO thin films deposited under different conditions was not only related to these phases but also to the growth orientation. The film uniformity and flatness are examined and discussed in terms of the gas flow pattern in the reactor.

HIGH Tc SUPERCONDUCTING THIN FILMS BY CHEMICAL SPRAY DEPOSITION

Enhancing superconductivity of ultrathin YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> films by capping non-superconducting oxides*

STUDY OF THE PREPARATION OF HIGH Tc SUPERCONDUCTING YBCO THIN FILMS BY A PLASMA-ASSISTED MOCVD PROCESS

Enhancing Superconductivity of Ultrathin YBa2Cu3O7-δ Films by Capping Non-Superconducting Oxides*

Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

High Quality Superconducting Thin Films by Sputtering

YBa2Cu3O7−y and YbBa2Cu3O7−y Superconducting Films Prepared by Chemical Solution Deposition on SrTiO3 (001) Substrate

Preparation of Superconducting Yba2cu3o7-X Films on Metallic Substrates by Pulsed Laser Deposition

Y-Ba-Cu-O Superconducting Films Grown on (100) Magnesia and Sapphire Substrates by A Melt Growth Method Without Crucible

Fabrication of Superconducting YBa2Cu4O8 Film via Coprecipitation

Bulk and thick films of the superconducting phase YBa2Cu3O7−y made by controlled precipitation and sol‐gel processes

Formation and Characterization of YBa2Cu3O7−δ High-Tc Thin Films by MOCVD with Single Mixed Precursor

Thick REBaCuO Superconducting Films Through Single-Coating of Low-Fluorine Metallorganic Solution

Superconducting properties and structural perfection of epitaxial YBa 2 Cu 3 O 7- x thin films

Preparation and Superconducting Properties of the (cu,c)ba2ca3cu4o11+y Films with Zero-Resistance Transition Temperature of 96 K

Insitu Fabrication Of Ybco/Ysz/Si Thin-Films By Laser Ablation

Rapidly Annealing Method for Preparing Superconducting Films

YBCO Superconducting Thin Film Preparation on Metallic Substrates by Laser

Preparation of Ultrafine Powder of the Ba-Y-Cu-O System and Its Superconductivity

A Crucibleless Liquid Phase Growth Method of Preparing the Y-Ba-Cu-0 Superconducting Films

Thin-Films Bi(Pb)-Sr-Ca-Cu-O (tc(zero)=105k) Prepared by Ion-Beam Sputtering