Abstract:Using a novel DC magnetron sputtering system, high quality YBa2Cu3O7-delta (YBCO) thin films were deposited on both sides of twelve pieces of 3-inch LaAlO3(001) single crystal substrates in one batch. This sputtering system has a rotatable disc sample holder with the LaAlO3 substrates being positioned in the middle of upper and lower YBCO targets. These two sputter guns are arranged to simultaneously deposit YBCO thin films on both sides of the substrate. The rotatable sample holder is an important approach to large scale deposition of high quality YBCO thin films. In this manner, the sputtered species can diffuse well around the substrates during one rotation cycle. Furthermore, the anode is installed in the inner of rotatable disc sample holder to avoid negative ion bombardment. Thus, a good uniformity over the whole area for all the films has been realized. The full-width at half-maximum (FWHM) values of the (005) rocking curves typically range from 0.49 degrees to 0.56 degrees. The superconducting critical temperatures fall in the range of 89-90 K and the critical current densities are between 3.75 and 4.0 MA cm(-2) at 77 K. The microwave surface resistance, R-S (77 K, 10 GHz), of the YBCO thin films range typically from 0.56 to 0.71 m Omega, which make these films suitable for microwave applications.

Preparation of YBa2Cu3O7−δ Thin Films by Magnetron Sputtering with I N S I T U Plasma Oxidation

Fabrication and Characterization of Y2O3 Stabilized ZrO2 Films Deposited with Aerosol-Assisted MOCVD

Deposition of Dense SiO2 Thin Films for Electrical Insulation Applications by Microwave ECR Plasma Source Enhanced RF Reactive Magnetron Sputtering

Preparation of Yba2cu3o7-X Superconducting Thin-Films over Large Area Substrates

Superconducting Characteristics and Epitaxial-Growth Analyses of YBa2Cu3O7−x Thin Films by Direct-Current Magnetron Sputtering

Superconducting properties and structural perfection of epitaxial YBa 2 Cu 3 O 7- x thin films

STUDY OF THE PREPARATION OF HIGH Tc SUPERCONDUCTING YBCO THIN FILMS BY A PLASMA-ASSISTED MOCVD PROCESS

Characteristics of Y1-Xcaxba2cu3o7-Delta Thin Films Grown by Dc Magnetron Sputtering

Enhancing superconductivity of ultrathin YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> films by capping non-superconducting oxides*

Studies of high temperature superconducting thin films by transmission electron microscopy

CaCu33Ti44O1212 Films Prepared by Magnetron S Puttering

Batch Production of Large-Area Double-Sided Yba2cu3o7-Delta Thin Films by Dc Magnetron Sputtering

Enhancing Superconductivity of Ultrathin YBa2Cu3O7-δ Films by Capping Non-Superconducting Oxides*

Pulsed Laser Deposition of YBa2Cu3O7 /i/lanio3trilayers (I SrTiO3, CeO2or Eu2CuO4) on (100) SrTiO3substrates

Single-Step In-Situ Preparation Of Magnesium Diboride Superconducting Thin Films By Dc Magnetron Sputtering

HIGH Tc SUPERCONDUCTING THIN FILMS BY CHEMICAL SPRAY DEPOSITION

Insitu Fabrication Of Ybco/Ysz/Si Thin-Films By Laser Ablation

Influence of Deposition Temperature on the Superconductivity of Y1?x HoxBa2Cu3O7 ??films Produced by Dc-Magnetron Sputtering

Formation and Characterization of YBa2Cu3O7−δ High-Tc Thin Films by MOCVD with Single Mixed Precursor

100 K (bi, Pb)-Sr-Ca-Cu-O Superconducting Films Produced by RF Magnetron Sputtering and Post Annealing

Growth and Annealing of La1.85Sr0.15CuO4+δthin Films on SrTiO3substrates