Single-Step In-Situ Preparation Of Magnesium Diboride Superconducting Thin Films By Dc Magnetron Sputtering

P Ma,Ly Liu,Sy Zhang,X Wang,Fx Xie,P Deng,Rj Nie,Sz Wang,Yd Dai,Fr Wang
DOI: https://doi.org/10.7498/aps.51.406
IF: 0.906
2002-01-01
Acta Physica Sinica
Abstract:In a single-step in-situ procedure, the superconducting MgB2, (101) highly oriented thin films have been successfully grown on the SrTiO3 (100) substrates by using the synthesised MgB2 target and controlling the magetron sputtering working at the state of abnormal glow discharge or arc discharge. The fillms have a zero resistance transition temperature of 15K and an onset transition temperature of 33K.
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