Fabrication of Superconducting MgB2 Thin Films by Magnetron co-Sputtering on (001) MgO Substrates

Savio Fabretti,Patrick Thomas,Markus Meinert,Inga-Mareen Imort,Andy Thomas
DOI: https://doi.org/10.1007/s10948-012-1959-5
2012-12-22
Journal of Superconductivity and Novel Magnetism
Abstract:We fabricated superconducting MgB2 thin films on (001) MgO substrates by magnetron rf and dc co-sputtering on heated substrates. We annealed the samples ex-situ and in-situ at temperatures between 450 ∘C and 750 ∘C. The substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of up to 27.1 K for the ex-situ and 25.6 K for the in-situ annealed samples at a film thickness of 30 nm. The samples shows an out of plane (0002)-Peak which was determined by x-ray diffraction.
physics, condensed matter, applied
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