Abstract:MgB2 has been recognized as a candidate material for fabricating superconducting nanowire single photon detectors with the expectation of having an operating temperature of the detector at 10-20 K. Preparation of ultrathin MgB2 films with high superconducting transition temperature TC is the first crucial step to achieve this goal. Here we present the hybrid physical-chemical vapor deposition of MgB2 superconducting films with thicknesses around 10 nm. The films are epitaxially grown on (111) MgO substrates. The TC of the films, including for a 6-nm-thick film, is found to be above 34 K, close to the bulk value of MgB2 (39 K). The normal-state resistivity at 42 K of a 10-nm-thick film is shown to be 3.1 μΩ cm, indicating that the film is relatively clean. The superconducting critical current density JC of the films has also been measured on strip lines patterned in the films. The JC of the 10-nm-thick film reaches 7.7 ×107 A/cm2 at 2 K, so far the highest value reported for MgB2 films of the same thickness. The high TC, low residual resistivity, and high JC of the ultrathin MgB2 films on MgO substrates suggest that these films have the potential in developing MgB2-based superconducting nanowire single photon detectors or other related superconducting devices.

Fabrication of superconducting magnesium diboride thin films by electron beam annealing

Influence of Electron-Beam Annealing Duration on MgB<sub>2</sub> Film Superconductivity

Magnesium Diboride Superconducting Films Synthesized by Different Electron-Beam Annealing Currents

Film Fabrication and Electronic Devices of MgB2 Superconductor

Fabrication of MgB 2 Films Via Multilayer Ex-Situ Annealing

MgB2 Films Prepared by Rapid Annealing Method

Fabrication of MgB2 Films Via Multilayer Ex-Situ Annealing

Elimination of Bubbles and Improvement of the Superconducting Properties in Mgb2 Films Annealed Using Electron Beam

STUDY OF MgB_2 THIN FILM PREPARED BY RAPID ELECTRON BEAM ANNEALING

Preparing Ultrathin MgB2 Thin Film by Ex Situ Annealing of Mg-B Precursor Film

SUPERCONDUCTING MgB2 FILMS VIA EX-SITU ANNEALING UNDER DIFFERENT Ar PRESSURE PREPARED BY E-BEAM EVAPORATION

MgB2 Double-Sided Thick Films Fabricated on Various Metals by Electrophoresis Method

GROWTH AND PROPERTIES OF SUPERCONDUCTING MgB_2 THIN FILM FABRICATED ON Al_2O_3 SUBSTRATE BY HYBRID PHYSICAL CHEMICAL VAPOR DEPOSITION

Superconducting magnesium diboride films on Silicon with Tc0 about 24K grown via vacuum annealing from stoichiometric precursors

Properties of MgB 2 Films Fabricated under Different Conditions by Ex-Situ Annealing of Mg/B Multilayer Precursor

Properties of Chemical-Vapor-deposition-prepared MgB2 Thin Films

MgB2 superconductor thin films on Si and Al2O3 substrates

Fabrication of Superconducting Nanowires from Ultrathin MgB2 Films Via Focused Ion Beam Milling

Fabrication of Superconducting MgB2 Thin Films by Magnetron co-Sputtering on (001) MgO Substrates

Hybrid Physical-Chemical Vapor Deposition of Ultrathin Mgb2 Films on Mgo Substrate with High T-C and J(C)

Superconducting MgB2 Thin Films with Tc ≈ 39 K Grown by Pulsed Laser Deposition